JPH0126530B2 - - Google Patents

Info

Publication number
JPH0126530B2
JPH0126530B2 JP16503481A JP16503481A JPH0126530B2 JP H0126530 B2 JPH0126530 B2 JP H0126530B2 JP 16503481 A JP16503481 A JP 16503481A JP 16503481 A JP16503481 A JP 16503481A JP H0126530 B2 JPH0126530 B2 JP H0126530B2
Authority
JP
Japan
Prior art keywords
transfer
feed
attached
pulse motor
rotation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16503481A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5866341A (ja
Inventor
Noboru Sato
Hirohide Kawahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP16503481A priority Critical patent/JPS5866341A/ja
Publication of JPS5866341A publication Critical patent/JPS5866341A/ja
Publication of JPH0126530B2 publication Critical patent/JPH0126530B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Control Of Conveyors (AREA)
  • Die Bonding (AREA)
JP16503481A 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置 Granted JPS5866341A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16503481A JPS5866341A (ja) 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16503481A JPS5866341A (ja) 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置

Publications (2)

Publication Number Publication Date
JPS5866341A JPS5866341A (ja) 1983-04-20
JPH0126530B2 true JPH0126530B2 (en]) 1989-05-24

Family

ID=15804572

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16503481A Granted JPS5866341A (ja) 1981-10-16 1981-10-16 リ−ドフレ−ム及びキヤリアの移送装置

Country Status (1)

Country Link
JP (1) JPS5866341A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60145141U (ja) * 1984-03-09 1985-09-26 株式会社東芝 Ｉｃフレ−ムの搬送整列装置
JPS6197836U (en]) * 1984-11-30 1986-06-23

Also Published As

Publication number Publication date
JPS5866341A (ja) 1983-04-20

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